Monfils broke again in the fifth game before clinching the set when Stepanek sent a backhand wide.
In the second set, Monfils served for the match at 5-4, but Stepanek broke him twice in row thanks to strong play at the net.
Monfils and Stepanek traded breaks early in the decider and then held serve until Monfils broke in the ninth game when Stepanek missed a volley.
“I’m burnt out, but tomorrow it will be a fierce mental battle,” said Monfils, who will play the first Masters 1000 final of his career against Djokovic. “Tomorrow I will give my life.”
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